Plate Calcined Alumina polishing powder is made of high-quality industrial alumina powder as raw material, and processed by a special production process. The crystal shape of the produced alumina polishing powder is hexagonal flat like tabular shape, so it is called Platelet Alumina or Tabular Alumina.
For semiconductor materials such as semiconductor silicon wafers, the application of plate aluminum oxide can reduce the grinding time, greatly improve the grinding efficiency, reduce the loss of the grinding machine, save labor and grinding costs, and increase the grinding pass rate.
Chemical composition
Chemical | Guarantee Value | Typical Value |
Al2O3 | ≥99.0% | 99.36% |
SiO2 | <0.2% | 0.017% |
Fe2O3 | <0.1% | 0.03% |
Na2O | <0.6% | 0.35% |
Physical properties
Material | α-Al2O3 |
Color | White |
Specific gravity | ≥3.9g/cm3 |
Mohs’Hardness | 9.0 |
Type | D3(um) | D50(um) | D94(um) |
CA45 | 50.5-56.2 | 33-38.5 | 20.7-24.5 |
CA40 | 39-44.6 | 27.7-31.7 | 18-20 |
CA35 | 35.4-39.8 | 23.8-27.2 | 15-17 |
CA30 | 28.1-32.3 | 19.2-22.3 | 13.4-15.6 |
CA25 | 24.4-28.2 | 16.1-18.7 | 9.6-11.2 |
CA20 | 20.9-24.1 | 13.1-15.3 | 8.2-9.8 |
CA15 | 14.8-17.2 | 9.4-11 | 5.8-6.8 |
CA12 | 11.8-13.8 | 7.6-8.8 | 4.5-5.3 |
CA09 | 8.9-10.5 | 5.9-6.9 | 3.3-3.9 |
CA05 | 6.6-7.8 | 4.3-5.1 | 2.55-3.05 |
CA03 | 4.8-5.6 | 2.8-3.4 | 1.5-2.1 |